Structure of silicon oxide films prepared by vacuum deposition

The structure of thin silicon oxide films 5 nm in thickness, which were prepared by electron beam evaporation of SiO₂ glass onto a NaCl substrate, has been examined by high resolution electron microscopy and diffraction. Although the films which were prepared with substrate temperatures ranging from room up to 400°C gave rise to amorphous haloes, lattice fringes in areas 1–2 nm in extent were, however, seen in the micrographs. It is shown that the film is composed of α-quartz micro-crystallites. Crystals of α-cristobalite with sizes of several tens of nanometers appeared at a substrate temperature of 500°C. At a substrate temperature of 600°C, β-cristobalite crystals with sizes of several tens of nanometers appeared. The structural changes due to the substrate temperature were attributed to incorporation of sodium atoms from the substrate into the SiO₂ film.