A high voltage capacitance measurement method based on alternating coupled signal injection.

As high voltage pulse power capacitors, ceramic capacitors are widely used in high voltage pulse generators, trigger circuits, laser generators, and other fields. The capacitance of ceramic capacitors is closely related to the direct current (DC) bias voltage. However, the current capacitance measurement methods can only achieve a DC bias of 1 kV, which cannot meet the measurement requirements in high voltage environments. This paper proposes a capacitance measurement method that can accurately measure the capacitance under a DC bias of 3 kV. This method decouples the high DC bias voltage and high frequency alternating small signals and realizes low voltage calibration and high voltage isolation. The experimental results show that the proposed method measures the capacitance under a DC bias of 3 kV with a relative error within ±1%, which makes it possible to accurately quantify the capacitance hysteresis deviation in the process of increasing and decreasing back the voltage.