多晶硅缺陷的光谱电致发光照相鉴别

T. Fuyuki, A. Tani, Sinichiro Tsujii, E. Sugimura
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引用次数: 4

摘要

利用光谱电致发光成像技术,可以一目了然地分辨出材料的内在缺陷和外在缺陷。具有深阱的本征缺陷诱导红外发射取决于电子阱能级。通过对比滤波后的图像,可以检测出可能对长期可靠性造成严重影响的外部缺陷。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Photographic distinction of defects in polycrystalline Si by spectroscopic electroluminescence
By using spectroscopic EL imaging technique, the intrinsic defects and the extrinsic deficiencies can be distinguished clearly at a glance. The intrinsic defects with deep traps induce infra-red emission depending on the electronic trap level. By comparing the filtered images, extrinsic defects which may cause serious effect on long term reliability can be detected photographically.
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