氢和sp-=SUP=-3-=/SUP=-混合碳的等离子化学沉积

Физика и техника полупроводников Pub Date : 2023-01-01 DOI:10.21883/ftp.2023.05.56195.09k

А. И. Охапкин, М. Н. Дроздов, П.А. Юнин, С.А. Краев, Д.Б. Радищев

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引用次数: 0

摘要

研究了甲烷等离子体参数对氢化类金刚石膜(DLC)沉积速率、氢含量和sp3-碳分数的影响。结果表明，sp3-碳分数的比例主要取决于感应功率和等离子体中加入的氩气;后者也有助于薄膜中氢的减少。

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Плазмохимическое осаждение гидрогенизованных пленок DLC с различным содержанием водорода и sp-=SUP=-3-=/SUP=--гибридного углерода

The influence of methane plasma parameters on the deposition rate and on the content of the hydrogen and the sp3-carbon fraction in hydrogenated diamond-like carbon films (DLC) was investigated. It was shown that the proportion of the sp3-carbon fraction mainly depends on the inductive power and the argon addition to the plasma; the latter also contributes to a decrease of hydrogen in the films.

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Физика и техника полупроводников

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