{"title":"SAW金属氧化物半导体气体传感器的优化设计","authors":"R. S. Falconer, R. Lec, J. Vetelino, Z. Xu","doi":"10.1109/ULTSYM.1989.67051","DOIUrl":null,"url":null,"abstract":"A simple theoretical model is applied to the problem of a SAW (surface acoustic wave) gas sensor which operates on the principle of conductivity changes within the sensing film. The model allows the prediction of SAW sensor response for a film of known conductivity variations, and the theoretical value of SAW velocity change agrees very well with that determined by experiment. The electroacoustic attenuation was also determined to be a significant factor in designing a SAW sensor. SAW sensor response can be optimized by designing the device such that the sheet conductivity of the film is within some region dependent upon the substrate material. A WO/sub 3/ film could be designed to have a sheet conductivity within a specific range by tailoring parameters such as film thickness, doping, and heat treatment. A sensor consisting of an ST-cut SiO/sub 2/ substrate and a WO/sub 3/ film selectively sorbent to H/sub 2/S was investigated. The SAW gas sensor is configured so that the film sheet conductivity and sensor response are measured simultaneously upon exposure to H/sub 2/S. Specific operating conditions are obtained that optimized the SAW gas sensor response.<<ETX>>","PeriodicalId":89469,"journal":{"name":"Proceedings. IEEE Ultrasonics Symposium","volume":"33 1","pages":"585-590 vol.1"},"PeriodicalIF":0.0000,"publicationDate":"1989-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Optimization of a SAW metal oxide semiconductor gas sensor\",\"authors\":\"R. S. Falconer, R. Lec, J. Vetelino, Z. Xu\",\"doi\":\"10.1109/ULTSYM.1989.67051\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A simple theoretical model is applied to the problem of a SAW (surface acoustic wave) gas sensor which operates on the principle of conductivity changes within the sensing film. The model allows the prediction of SAW sensor response for a film of known conductivity variations, and the theoretical value of SAW velocity change agrees very well with that determined by experiment. The electroacoustic attenuation was also determined to be a significant factor in designing a SAW sensor. SAW sensor response can be optimized by designing the device such that the sheet conductivity of the film is within some region dependent upon the substrate material. A WO/sub 3/ film could be designed to have a sheet conductivity within a specific range by tailoring parameters such as film thickness, doping, and heat treatment. A sensor consisting of an ST-cut SiO/sub 2/ substrate and a WO/sub 3/ film selectively sorbent to H/sub 2/S was investigated. The SAW gas sensor is configured so that the film sheet conductivity and sensor response are measured simultaneously upon exposure to H/sub 2/S. Specific operating conditions are obtained that optimized the SAW gas sensor response.<<ETX>>\",\"PeriodicalId\":89469,\"journal\":{\"name\":\"Proceedings. IEEE Ultrasonics Symposium\",\"volume\":\"33 1\",\"pages\":\"585-590 vol.1\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-10-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings. IEEE Ultrasonics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.1989.67051\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings. IEEE Ultrasonics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1989.67051","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optimization of a SAW metal oxide semiconductor gas sensor
A simple theoretical model is applied to the problem of a SAW (surface acoustic wave) gas sensor which operates on the principle of conductivity changes within the sensing film. The model allows the prediction of SAW sensor response for a film of known conductivity variations, and the theoretical value of SAW velocity change agrees very well with that determined by experiment. The electroacoustic attenuation was also determined to be a significant factor in designing a SAW sensor. SAW sensor response can be optimized by designing the device such that the sheet conductivity of the film is within some region dependent upon the substrate material. A WO/sub 3/ film could be designed to have a sheet conductivity within a specific range by tailoring parameters such as film thickness, doping, and heat treatment. A sensor consisting of an ST-cut SiO/sub 2/ substrate and a WO/sub 3/ film selectively sorbent to H/sub 2/S was investigated. The SAW gas sensor is configured so that the film sheet conductivity and sensor response are measured simultaneously upon exposure to H/sub 2/S. Specific operating conditions are obtained that optimized the SAW gas sensor response.<>
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