半导体多层膜从极紫外到远红外的光学特性模拟

Ravindra Nm
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引用次数: 1

摘要

半导体的光学特性在各种应用中起着至关重要的作用,包括光学元件、器件和光源的设计和制造、能量转换和过程监控。虽然多年来对半导体光学特性的基本理解已经增长,但半导体光学常数的可靠数据,特别是在红外波长范围内,在文献中严重缺乏。本文基于Forouhi-Bloomer色散方程,详细分析了绝缘体上硅(SOI)和锗光电探测器的光学特性与光子能量(或波长)和厚度的关系。基于这一关系得到的仿真结果与文献值吻合较好,与一些公认的研究结果一致。此外,本文的分析结果有助于确定和实现材料在不同光子能量和厚度条件下的光学响应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Simulation of optical properties of semiconductor multilayers from extreme ultraviolet to far infrared
Optical properties of semiconductors play a critical role in various applications including the design and manufacture of optical components, devices & sources, energy conversion and process monitoring & control. While the fundamental understanding of the optical properties of semiconductors has grown over the years, reliable data of the optical constants of semiconductors, particularly in the infrared range of wavelengths, is severely lacking in the literature. In this overview, detailed case studies of the optical properties of Silicon on Insulator (SOI) and Ge photodetectors, based on Forouhi-Bloomer dispersion equation, as function of photon energy (or wavelength) and thickness are presented. The obtained simulation results, based on this relation, are in good accord with the literature values and are consistent with some well-accepted studies. Furthermore, the results reported in this analysis are helpful for the determination and realization of the optical response of materials under conditions of varying photon energy and thickness.
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