{"title":"微加工电感式线性微定位传感器","authors":"D. Dinulovic, H. Gatzen","doi":"10.1109/ICSENS.2004.1426446","DOIUrl":null,"url":null,"abstract":"The inductance of an inductive device with a moving core changes as a function of the core position. By extending this principle to a microtransformer with multiple, evenly spaced cores, a measurement system combining features of analog (variable reluctance) and incremental positioning may be devised. For detecting the direction of motion (to know in which direction to count), an incremental length measurement system requires not just one, but two output signals, which have to be offset by 90 degrees. The paper presents a microtransformer based positioning system fulfilling these requirements. It presents the fabrication technology employed and discusses experimental test results.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":"47 1","pages":"1399-1402 vol.3"},"PeriodicalIF":0.0000,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Microfabricated inductive linear micro positioning sensor\",\"authors\":\"D. Dinulovic, H. Gatzen\",\"doi\":\"10.1109/ICSENS.2004.1426446\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The inductance of an inductive device with a moving core changes as a function of the core position. By extending this principle to a microtransformer with multiple, evenly spaced cores, a measurement system combining features of analog (variable reluctance) and incremental positioning may be devised. For detecting the direction of motion (to know in which direction to count), an incremental length measurement system requires not just one, but two output signals, which have to be offset by 90 degrees. The paper presents a microtransformer based positioning system fulfilling these requirements. It presents the fabrication technology employed and discusses experimental test results.\",\"PeriodicalId\":20476,\"journal\":{\"name\":\"Proceedings of IEEE Sensors, 2004.\",\"volume\":\"47 1\",\"pages\":\"1399-1402 vol.3\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of IEEE Sensors, 2004.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2004.1426446\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2004.1426446","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Microfabricated inductive linear micro positioning sensor
The inductance of an inductive device with a moving core changes as a function of the core position. By extending this principle to a microtransformer with multiple, evenly spaced cores, a measurement system combining features of analog (variable reluctance) and incremental positioning may be devised. For detecting the direction of motion (to know in which direction to count), an incremental length measurement system requires not just one, but two output signals, which have to be offset by 90 degrees. The paper presents a microtransformer based positioning system fulfilling these requirements. It presents the fabrication technology employed and discusses experimental test results.
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