近大气压x射线光电子能谱原位研究水吸附超薄GeO 2 /Ge和sio2 /Si结构

Hyomen Kagaku Pub Date : 2017-07-10 DOI:10.1380/JSSSJ.38.330
Kenta Arima
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引用次数: 0

摘要

利用近大气压x射线光电子能谱(NAP-XPS)对Ge衬底上的水吸附超薄GeO 2薄膜进行了测量,并与Si衬底上的sio2薄膜进行了比较。我们在相对湿度(RH)高达~ 15%时获得了NAP-XPS光谱,结果表明,在相对湿度(RH)高于~ 10−4%时,GeO 2 / Ge结构比sio2 / Si结构吸引更多的水分子。这可能是因为水分子渗透到geo2薄膜中形成羟基。然后我们通过与x射线的相互作用揭示了水吸附二氧化硅薄膜的正电荷。对于水吸附的geo2膜,我们观察到膜的正电荷较大,并讨论了其来源。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Water-Adsorbed Ultrathin GeO 2 /Ge and SiO 2 /Si Structure Studied In Situ by Near-Ambient-Pressure X-ray Photoelectron Spectroscopy
We carried out near-ambient-pressure X-ray photoelectron spectroscopy (NAP-XPS) measurements of water-adsorbed ultrathin GeO 2 films on Ge substrates, and the results were compared with those for SiO 2 films on Si. We obtained NAP-XPS spectra at relative humidity (RH) values of up to 〜 15 % and showed that the GeO 2 / Ge structures attract more water molecules than the SiO 2 / Si structures at RH above 〜 10 − 4 % . This is probably because water molecules infiltrate the GeO 2 films to form hydroxyls. Then we revealed positive charging of the water-adsorbed SiO 2 films by their interaction with X-rays. For the water-adsorbed GeO 2 films, we observed greater positive charging of the films, of which origin is discussed.
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