V. Uglov, S. Zlotski, I. A. Solodukhin, A. A. Malashevich
{"title":"反应磁控管沉积ZrN/SiNx多层镀层的显微组织和相组成","authors":"V. Uglov, S. Zlotski, I. A. Solodukhin, A. A. Malashevich","doi":"10.33581/2520-2243-2019-2-105-111","DOIUrl":null,"url":null,"abstract":"In the present work, the microstructure and phase composition of multilayered nanoscaled ZrN/SiNx coatings with different thicknesses of individual ZrN and SiNx layers were investigated. The results of transmission electron microscopy (HRTEM) showed that multilayer ZrN/SiNx coatings formed by reactive magnetron deposition are alternating layers of ZrN and SiNx. The X-ray reflectometry (XRR) method made it possible to determine the density, thickness, and surface roughness of individual ZrN and SiNx layers. X-ray diffraction analysis showed that ZrN and SiNx layers have a crystalline and amorphous structure, respectively. The phase composition of mononitride ZrN coatings is characterized by the presence ZrN phase with preferential orientation (111). Phase composition results indicate a change in the preferential orientation from (111) observed for the mononitride ZrN films, to (200) forming in the multilayered ZrN/SiNx coatings.","PeriodicalId":17264,"journal":{"name":"Journal of the Belarusian State University. Physics","volume":"52 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2019-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Microstructure and phase composition of ZrN/SiNx multilayered coatings formed by reactive magnetron deposition\",\"authors\":\"V. Uglov, S. Zlotski, I. A. Solodukhin, A. A. Malashevich\",\"doi\":\"10.33581/2520-2243-2019-2-105-111\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In the present work, the microstructure and phase composition of multilayered nanoscaled ZrN/SiNx coatings with different thicknesses of individual ZrN and SiNx layers were investigated. The results of transmission electron microscopy (HRTEM) showed that multilayer ZrN/SiNx coatings formed by reactive magnetron deposition are alternating layers of ZrN and SiNx. The X-ray reflectometry (XRR) method made it possible to determine the density, thickness, and surface roughness of individual ZrN and SiNx layers. X-ray diffraction analysis showed that ZrN and SiNx layers have a crystalline and amorphous structure, respectively. The phase composition of mononitride ZrN coatings is characterized by the presence ZrN phase with preferential orientation (111). Phase composition results indicate a change in the preferential orientation from (111) observed for the mononitride ZrN films, to (200) forming in the multilayered ZrN/SiNx coatings.\",\"PeriodicalId\":17264,\"journal\":{\"name\":\"Journal of the Belarusian State University. Physics\",\"volume\":\"52 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of the Belarusian State University. Physics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.33581/2520-2243-2019-2-105-111\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Belarusian State University. Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.33581/2520-2243-2019-2-105-111","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Microstructure and phase composition of ZrN/SiNx multilayered coatings formed by reactive magnetron deposition
In the present work, the microstructure and phase composition of multilayered nanoscaled ZrN/SiNx coatings with different thicknesses of individual ZrN and SiNx layers were investigated. The results of transmission electron microscopy (HRTEM) showed that multilayer ZrN/SiNx coatings formed by reactive magnetron deposition are alternating layers of ZrN and SiNx. The X-ray reflectometry (XRR) method made it possible to determine the density, thickness, and surface roughness of individual ZrN and SiNx layers. X-ray diffraction analysis showed that ZrN and SiNx layers have a crystalline and amorphous structure, respectively. The phase composition of mononitride ZrN coatings is characterized by the presence ZrN phase with preferential orientation (111). Phase composition results indicate a change in the preferential orientation from (111) observed for the mononitride ZrN films, to (200) forming in the multilayered ZrN/SiNx coatings.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
