MEMS微镜中介电表面电荷引起的倾斜角漂移的物理建模和长期测量

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659038

M. Nakajima, K. Kuwabara, Takako Ishihara, T. Sakata, M. Usui, N. Nemoto, E. Hashimoto, J. Yamaguchi, S. Uchiyama, Yoshito Jin

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引用次数: 5

摘要

MEMS微镜的介电充电会引起倾角漂移，这是电信应用中主要的可靠性问题。本文提出了一种考虑介电氧化物表面电荷运动的MEMS反射镜系统角度漂移的物理模型。模型计算结果与实验结果吻合较好，表明该模型可以预测角度漂移。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A physical modeling and long-term measurement of tilting angle drift caused by dielectric surface charging in MEMS micromirrors

Dielectric charging of MEMS micromirrors causes tilt angle drift, which is a major reliability problem for telecom applications. In this paper, we propose a physical model of angle drift in a MEMS mirror system considering surface charge motion on dielectric oxide. Good agreement is obtained between the model calculation and experimental results, which suggest that angle drift can be predicted by the proposed model.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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