薛定谔方程用于辉光放电等离子体发生器中现象的研究

S. Sheptunov, V. Logvin, L. Uvarova, T. Karlova
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摘要

工作目的是发展理论,确保在辉光放电等离子体发生器中创建有效的快速过程控制系统,并促进新技术和设备的发展,以便在可控的自动化工具生产条件下实现它们。量子力学中有一些常用的规则,任何系统都可以用一般情况下的复数波函数来描述。的波函数的模平方表示的概率密度定义了在时刻t在等离子体发生器封闭体积的近阴极区域的某一点上以半径矢量找到带电粒子的可能性。在进行调查的过程中,获得了以下结果。辉光放电等离子体发生器中带电粒子流的形成具有概率性。薛定谔方程用于获得描述发光电荷等离子体发生器中带电粒子流形成过程的分析依赖关系是最相应的,因为它允许根据所使用的气体技术环境定义其能量值。气体工艺环境泵送的速率变化,允许根据流动中离子质量的指数分布,在考虑其质量和能量的情况下,在流动中形成相应体积的具有指定能量和频率的离子。在自动化技术环境中,改变了一种气体技术环境及其泵送速率,可以获得辉光放电等离子体对产品表面影响的可预测结果,解释了缺陷产生的影响。在辉光放电等离子体发生器中,由于高能离子轰击加工产物表面,发现了具有自组织元素的耗散过程。流动中低能离子的存在保证了离子电流的转移,从而导致材料表面体积的化学和相结构的变化,其晶体结构的修饰和减少以及表面的非晶化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
SCHROEDINGER EQUATION USE FOR INVESTIGATIONS OF PHENOMENA TAKING PLACE IN PLASMA GENERATOR OF GLOW DISCHARGE
The work purpose is development of the theory ensuring creation of an efficient system of fast process control in the plasma generator of a glow discharge and contributing to the development of new techniques and equipment for their realization under conditions of controllable automated tool production. There are used regulations of quantum mechanics lying in that any system can be described by setting in a general case a complex wave function of the kind of . A possibility to find out a charged particle at the time t in some point of the near-cathode area of the closed volume of the plasma generator with the radius-vector was defined by probability density which is presented by a module square of the wave function of . In the course of the investigation carried out there are obtained the following results. The formation of charged particle flows in the plasma generator of a glow discharge has a probabilistic character. The Schroedinger equation use to obtain analytical dependences describing the processes of charged particle flows formation in the plasma generator of a glow charge is the most corresponding as it allows defining a value of their energy depending on the gas technological environment used. The rate change of gas technological environment pumping allows forming a corresponding volume of ions having specified energy and frequency, in the flow taking into account their mass and energy according to the adopted exponential distribution of ion mass in the flow. In automated technological environment having changed a kind of gas technological environment and a rate of its pumping it is possible to obtain predictable results of the impact of glow discharge plasma upon a surface of products worked explaining the effect of defect generation. As a result of high-energy ion bombardment of the surface of products under processing in the plasma generator of the glow discharge there is discovered the presence of a dissipative process with the elements of self-organization. The low-energy ion presence in the flow ensures an ion current transfer which results in the change of chemical and phase structure in the surface volume of material, its modification and reduction of a crystalline structure and also in amorphism on the surface.
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