氧压对热蒸发器沉积多晶Cu2O膜表面性能的影响

I. A. Khan, S. Hussain, A. Nadeem, M. Saleem, A. Hassnain, R. Ahmad
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引用次数: 0

摘要

采用热蒸发器在不同氧压(0.2、0.3和0.4 mbar)条件下在Cu衬底上沉积了多晶氧化亚铜(P-Cu2O)薄膜。XRD衍射图显示Cu(200)、Cu2O(200)和Cu2O(311)衍射面发育,证实了P-Cu2O薄膜的沉积。Cu2O(200)和Cu2O(311)平面的强度与op的增加有关,(200)和(311)平面的晶粒尺寸和微应变分别为19.31、21.18和11.32 nm;22.04、23.11、12.08 nm和0.113、0.103、0.193;随着OP的增加,分别为0.099、0.096、0.181。d-间距和晶格常数分别为0.210、0.128 nm和0.421、0.425 nm。P-Cu2O膜的键长为0.255 nm。这些平面的单位面积晶数分别为12.21、7.46、45.16 nm-2和8.21、5.75、37.16 nm-2。随着OP的增大,这些平面的纹理系数分别为1.22、1.26、1.11和0.78、0.74、0.56。O、Cu含量分别为5.31、5.92、6.94 wt %和83.01、82.44、80.65 wt %。随着OP的增加,P-Cu2O膜的厚度和生长速率分别为87.9、71.9、65.5 nm和17.6、14.2、13.1 (nm/min)。随着OP的增大,P-Cu2O薄膜的折射率和能带隙分别为1.96、1.89、1.92和2.47、2.44、2.25 eV。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Role of Oxygen Pressure on the Surface Properties of Polycrystalline Cu2O Films Deposited By Thermal Evaporator
Polycrystalline cuprous oxide (P-Cu2O) films are deposited on Cu substrates for various (0.2, 0.3 and 0.4 mbar) oxygen pressures (OP) by thermal evaporator. The XRD pattern shows the development of Cu (200), Cu2O (200) and Cu2O (311) diffraction planes which confirms the deposition of P-Cu2O films. The intensity of Cu2O (200) and Cu2O (311) planes is associated with the increase of OP. The crystallite size and microstrains developed in (200) and (311) planes are found to be 19.31, 21.18, 11.32 nm; 22.04, 23.11, 12.08 nm and 0.113, 0.103, 0.193; 0.099, 0.096, 0.181 with increasing OP respectively. The d-spacing and lattice constant are found to be 0.210, 0.128 nm and 0.421, 0.425 nm respectively. The bond length of P-Cu2O film is found to be 0.255 nm. The crystallites/unit area of these planes is found to be 12.21, 7.46, 45.16 nm-2 and 8.21, 5.75, 37.16 nm-2 respectively. The texture coefficients of these planes are found to be 1.22, 1.26, 1.11 and 0.78, 0.74 and 0.56 with increasing OP respectively. The O and Cu contents are found to be 5.31, 5.92, 6.94 wt % and 83.01, 82.44, 80.65 wt % respectively. The thickness and growth rate of P-Cu2O films are found to be 87.9, 71.9, 65.5 nm and 17.6, 14.2, 13.1 (nm/min) with increasing OP respectively. The SEM micro-structures reveal the formations of patches of irregular shapes, rounded nano-particles, clouds of nano-particles and their distribution depend on the increasing OP. The refractive index and energy band gap of P-Cu2O films are found to be 1.96, 1.89, 1.92 and 2.47, 2.44 and 2.25 eV with increasing OP respectively.
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