基于质量-弹簧模型的射频体声波谐振器非线性扰动分析

2019 IEEE International Ultrasonics Symposium (IUS) Pub Date : 2019-10-01 DOI:10.1109/ULTSYM.2019.8926245

K. Hashimoto, Xinyi Li, J. Bao, Luyan Qiu, T. Omori

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引用次数: 10

摘要

本文利用h型压电本构方程，从一阶微扰分析出发，推导出薄膜体腔非线性响应的等效电路。为简便起见，在推导中将电极和压电层看作质量和弹簧。结果表明，该电路可以很好地模拟H2响应。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Perturbation Analysis of Nonlinearity in Radio Frequency Bulk Acoustic Wave Resonators Using Mass-Spring Model

This paper describes derivation of an equivalent circuit for nonlinear responses in film bulk acoustic resonators from the first-order perturbation analysis using the piezoelectric constitutive equations with the h-form. For simplicity, electrodes and piezoelectric layer are regarded as a mass and spring in the derivation. Then it is demonstrated that the H2 response can be simulated well by the circuit.

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2019 IEEE International Ultrasonics Symposium (IUS)

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