A 45nm SOI embedded DRAM macro for POWER7TM 32MB on-chip L3 cache

Logic-based embedded DRAM has matured into a wide range of ASIC applications, SRAM replacements [1] and off-chip caches for microprocessors [2]. While embedded DRAM has been leveraged in supercomputers such as IBM's BlueGene/L [3], it's use has been limited to moderate performance bulk logic technologies. Although prototypes have been demonstrated [4], DRAM has yet to be embedded on a high performance microprocessor. This paper discloses an SOI DRAM macro implemented on-chip with the IBM POWER7™ high performance microprocessor [5], and introduces enhancements to the micro sense amp (µSA) architecture [6]. This high performance DRAM macro is used to construct a large 32MB L3 cache on-chip, eliminating delay, area and power from the off-chip interface, simultaneously improving system performance, reducing cost, power and soft error vulnerability. Figure 19.1.1a shows an SEM of the 45nm SOI DRAM Device and Deep Trench (DT) capacitor [7]. DT offers 25x more capacitance than planar structures and was also utilized to reduce on-chip voltage island supply noise.