H. Achour, B. Crețu, J. Routoure, R. Carin, A. Benfdila, E. Simoen, C. Claeys
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Performances under saturation operation of p-channel FinFETs on SOI substrates at cryogenic temperature
The impact of cryogenic temperature operation on the short channel effects and analog performances was analysed on strained and unstrained p-channel SOI FinFETs. The main electrical parameters extracted from the saturation mode of operation are investigated and compared to those found at room temperature. Low frequency noise measurements at 10 K operation show that the carrier number fluctuations dominate the flicker noise in moderate inversion, while the access resistance noise contributions prevail in strong inversion.