嵌入式NEMS传感器及其潜在生物医学应用的硅纳米线表征

2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO) Pub Date : 2013-12-01 DOI:10.1109/IMWS-BIO.2013.6756159

Songsong Zhang, Liang Lou, Tao Wang, W. Tsang, D. Kwong, Chengkuo Lee

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引用次数: 1

摘要

本文报道了采用压阻式硅纳米线(SiNWs)作为压力、应变和流量检测传感元件的各种纳米机电系统(NEMS)传感器。测量结果表明，基于sinw的NEMS器件具有良好的可扩展性和传感稳定性。此外，采用新型微槽膜片结构的新型超紧凑压力传感器用于低压范围测量，具有潜在的生物医学应用前景。

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Characterizations of silicon nanowires (SiNWs) embedded NEMS sensors and for potential biomedical applications

Various Nanoelectromechanical Systems (NEMS) sensors using piezoresistive silicon nanowires (SiNWs) as the sensing elements for pressure, strain and flow detection are reported. Measurement results reveal both excellent scalability and sensing stability for SiNWs based NEMS devices. Additionally, the new ultracompact pressure sensor with novel micro-grooved diaphragm structure is reported for low pressure range measurement, which leads to potential bio-medical applications.

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来源期刊

2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO)

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