Kari Gustafsson , Bertil Hök, Lars Jonsson , Christer Ovrén
{"title":"基于荧光衰减的硅基光纤压力传感器","authors":"Kari Gustafsson , Bertil Hök, Lars Jonsson , Christer Ovrén","doi":"10.1016/0250-6874(89)87083-0","DOIUrl":null,"url":null,"abstract":"<div><p>A multimode fibre optic pressure sensor based on decay-rate modulation in Nd:glass is presented. Silicon micromechanics are used in the fabrication of the pressure diaphragm and the sensor structure. Preliminary results are presented, together with a brief description of the fabrication.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"19 4","pages":"Pages 327-332"},"PeriodicalIF":0.0000,"publicationDate":"1989-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87083-0","citationCount":"5","resultStr":"{\"title\":\"A fibre optic pressure sensor in silicon based on fluorescence decay\",\"authors\":\"Kari Gustafsson , Bertil Hök, Lars Jonsson , Christer Ovrén\",\"doi\":\"10.1016/0250-6874(89)87083-0\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>A multimode fibre optic pressure sensor based on decay-rate modulation in Nd:glass is presented. Silicon micromechanics are used in the fabrication of the pressure diaphragm and the sensor structure. Preliminary results are presented, together with a brief description of the fabrication.</p></div>\",\"PeriodicalId\":101159,\"journal\":{\"name\":\"Sensors and Actuators\",\"volume\":\"19 4\",\"pages\":\"Pages 327-332\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-09-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0250-6874(89)87083-0\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0250687489870830\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489870830","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A fibre optic pressure sensor in silicon based on fluorescence decay
A multimode fibre optic pressure sensor based on decay-rate modulation in Nd:glass is presented. Silicon micromechanics are used in the fabrication of the pressure diaphragm and the sensor structure. Preliminary results are presented, together with a brief description of the fabrication.
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