电力/地网络的变化感知电迁移分析

Di-An Li, M. Marek-Sadowska
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引用次数: 17

摘要

由于线材尺寸缩小、电流密度增大和工艺变化,电迁移(EM)已成为主要的可靠性问题。现有的后端设计流程使用最大允许电流密度作为防止电磁干扰的唯一实用指导。因此需要能够执行全面电磁干扰分析的工具。在本文中,我们首先解释了为什么电流密度本身并不能决定导线对电磁的易感性。我们介绍了我们的变化感知电磁分析工具VEMA,用于电源/地网络,这通常是芯片的电磁关键部分。我们的工具考虑了两种类型的变化:电路级和电线几何级。VEMA报告了电路级变化的电线寿命分布。与现有的电磁分析仪SysRel相比,VEMA更有效地过滤出电磁不灭线,并为电磁违规纠正提供详细的反馈。VEMA还提供了电磁致死导线的几何级公差信息。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Variation-aware electromigration analysis of power/ground networks
Due to shrinking wire dimensions, higher current density, and process variations, electromigration (EM) has become a major reliability problem. The existing backend design flows use the maximum allowed current density as the only practical guidance to prevent EM. There is a need for tools capable of performing comprehensive EM analyses. In this paper, we first explain why current density alone does not determine wire's susceptibility to EM. We introduce our variation-aware EM analysis tool, VEMA, for power/ground networks, which are typically the EM-critical parts of a chip. Our tool considers two types of variations: circuit-level and wire geometry-level. VEMA reports distributions of wire lifetimes for circuit-level variations. Compared to existing EM analyzer SysRel, VEMA filters out EM-immortal wires more efficiently and provides detailed feedback for EM violation corrections. VEMA also provides information of geometry-level tolerance for EM-mortal wires.
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