Dong-Woon Park, Gyung-Hwan Oh, Heon-Su Kim, Jindoo Choi, F. Righetti, J. Kang, Hak-Sung Kim
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In Situ Thickness Measurements of a Silicon Wafer with a Deposited Thin Layer Using Multi-Reflected Terahertz Electromagnetic Waves Through Quartz Chamber Window
期刊介绍:
The Journal of Infrared, Millimeter, and Terahertz Waves offers a peer-reviewed platform for the rapid dissemination of original, high-quality research in the frequency window from 30 GHz to 30 THz. The topics covered include: sources, detectors, and other devices; systems, spectroscopy, sensing, interaction between electromagnetic waves and matter, applications, metrology, and communications.
Purely numerical work, especially with commercial software packages, will be published only in very exceptional cases. The same applies to manuscripts describing only algorithms (e.g. pattern recognition algorithms).
Manuscripts submitted to the Journal should discuss a significant advancement to the field of infrared, millimeter, and terahertz waves.