集成光声太赫兹气体传感器

2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) Pub Date : 2019-09-01 DOI:10.1109/IRMMW-THz.2019.8873764

Mattias Verstuyft, E. Akiki, B. Walter, Marc Faucher, Mathias Vanwolleghem, B. Kuyken

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引用次数: 2

摘要

提出了一种利用光声将吸收的太赫兹光转换为机械运动的片上气体探测器。该硅芯片将光限制在光学腔内，光学腔内装有声-机械腔。微量气体的浓度可以由膜运动的振幅来确定。所提出的模拟预测了1 mW太赫兹功率下1 ppm甲醇的最小可检测极限和25 ms的集成时间。

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An Integrated Photoacoustic Terahertz Gas Sensor

An on-chip gas detector that transduces absorbed terahertz light to a mechanical motion using photoacoustics is proposed. The silicon chip confines light in an optical cavity, wherein an acousto-mechanical cavity is housed. The concentration of a trace gas can be determined from the amplitude of a membrane’s motion. The simulations presented predict a minimum detectable limit of 1 ppm of methanol for 1 mW of terahertz power and an integration time of 25 ms.

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来源期刊

2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)

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