气敏用脉冲激光沉积法制备cuo掺杂二氧化锡薄膜的表征

IF 4.2 Q2 NANOSCIENCE & NANOTECHNOLOGY

Proceedings of the Institution of Mechanical Engineers Part N-Journal of Nanomaterials Nanoengineering and Nanosystems Pub Date : 2018-12-29 DOI:10.1177/2397791418819267

I. Naji

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引用次数: 4

摘要

研究了不同CuO添加量(5%、10%、15%和20%)对氧化锡薄膜结构、光学和电学性能的影响。采用脉冲激光沉积法制备薄膜。x射线衍射图显示，所有薄膜均为多晶结构，SnO2为四方相，CuO为单斜相，两者之间无反应。对薄膜的表面形貌进行了分析，发现掺10%和15% CuO的样品具有纳米级晶粒。霍尔效应测量表明，随着CuO比的增加，电导率增加，20% CuO时载流子类型从n型转移到p型。SnO2薄膜中CuO比和操作温度对H2S传感性能有影响。负载10% CuO的SnO2传感器对H2S非常敏感，最佳工作温度为50℃，对痕量(10 ppm) H2S气体检测的响应速度为7 s，恢复时间为20 s。

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Characterization of CuO-doped tin dioxide thin films prepared by pulsed-laser deposition for gas-sensing applications

The influence of doping level of tin oxide films with different amounts of CuO additives (5%, 10%, 15%, and 20%) on structural, optical, and electrical properties is investigated. The films were prepared by pulsed-laser deposition method. X-ray diffraction patterns show the polycrystalline structure for all films with tetragonal phase for SnO2 and monoclinic phase for CuO, and no reaction between them. The surface morphology of films was analyzed and it revealed nano-sized grains for samples doped with 10% and 15% CuO. Hall’s effect measurements show increasing conductivity with increase in the CuO ratio and transfer the type of charge carriers from n- to p-type with 20% CuO. The H2S sensing properties are influenced by the CuO ratio in the SnO2 films as well as the operation temperature. The SnO2 sensor loaded with 10% CuO is extremely sensitive to H2S and the best operation temperature is 50°C, and it exhibits fast response speed of 7 s and recovery time of 20 s for trace level (10 ppm) H2S gas detection.

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来源期刊

Proceedings of the Institution of Mechanical Engineers Part N-Journal of Nanomaterials Nanoengineering and Nanosystems NANOSCIENCE & NANOTECHNOLOGY-

CiteScore

6.00

自引率

1.70%

发文量

期刊介绍： Proceedings of the Institution of Mechanical Engineers Part N-Journal of Nanomaterials Nanoengineering and Nanosystems is a peer-reviewed scientific journal published since 2004 by SAGE Publications on behalf of the Institution of Mechanical Engineers. The journal focuses on research in the field of nanoengineering, nanoscience and nanotechnology and aims to publish high quality academic papers in this field. In addition, the journal is indexed in several reputable academic databases and abstracting services, including Scopus, Compendex, and CSA's Advanced Polymers Abstracts, Composites Industry Abstracts, and Earthquake Engineering Abstracts.