MEMS Tunable Dual-Wavelength Laser with Large Tuning Range

This paper presents a MEMS tunable dual-wave length laser, which simultaneously achieves wide tuning range and two-longitudinal-mode emission. The construction of this laser is based on Littman external cavity configuration. The key point is to use two micro-mirrors to select two different wavelengths at their independent diffraction modes, and the emission of both wavelengths will be collected through the 0th order of the grating. Meanwhile, wavelength tuning is achieved by rotating one of the mirrors. As a result, a tunable spectral separation of dual-wave length output is obtained. The MEMS device is fabricated by DRIE on SOI wafer, with the size of 3 mm times 3 mm.