{"title":"沉积条件对喷雾热解法制备氧化锌薄膜气敏性的影响","authors":"P Nunes, E Fortunato, A Lopes, R Martins","doi":"10.1016/S1466-6049(01)00136-2","DOIUrl":null,"url":null,"abstract":"<div><p><span><span>In this work we present preliminary results on the sensitivity to methane gas of zinc oxide thin films deposited by </span>spray pyrolysis. It was found that using highly resistive (above 10</span><sup>4</sup> Ω cm) thin films and by performing the measurements at 200°C a sensitivity better than one order of magnitude was found to detect 2000 ppm of methane. A linear dependence on the sensitivity between 100 and 2000 ppm of methane was also obtained.</p></div>","PeriodicalId":100700,"journal":{"name":"International Journal of Inorganic Materials","volume":"3 8","pages":"Pages 1129-1131"},"PeriodicalIF":0.0000,"publicationDate":"2001-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/S1466-6049(01)00136-2","citationCount":"53","resultStr":"{\"title\":\"Influence of the deposition conditions on the gas sensitivity of zinc oxide thin films deposited by spray pyrolysis\",\"authors\":\"P Nunes, E Fortunato, A Lopes, R Martins\",\"doi\":\"10.1016/S1466-6049(01)00136-2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p><span><span>In this work we present preliminary results on the sensitivity to methane gas of zinc oxide thin films deposited by </span>spray pyrolysis. It was found that using highly resistive (above 10</span><sup>4</sup> Ω cm) thin films and by performing the measurements at 200°C a sensitivity better than one order of magnitude was found to detect 2000 ppm of methane. A linear dependence on the sensitivity between 100 and 2000 ppm of methane was also obtained.</p></div>\",\"PeriodicalId\":100700,\"journal\":{\"name\":\"International Journal of Inorganic Materials\",\"volume\":\"3 8\",\"pages\":\"Pages 1129-1131\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/S1466-6049(01)00136-2\",\"citationCount\":\"53\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Inorganic Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1466604901001362\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Inorganic Materials","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1466604901001362","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Influence of the deposition conditions on the gas sensitivity of zinc oxide thin films deposited by spray pyrolysis
In this work we present preliminary results on the sensitivity to methane gas of zinc oxide thin films deposited by spray pyrolysis. It was found that using highly resistive (above 104 Ω cm) thin films and by performing the measurements at 200°C a sensitivity better than one order of magnitude was found to detect 2000 ppm of methane. A linear dependence on the sensitivity between 100 and 2000 ppm of methane was also obtained.
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