{"title":"可切换铁电BST-on-Si复合fbar中的侧波杂散模式消除","authors":"Seungku Lee, M. Koohi, A. Mortazawi","doi":"10.1109/MWSYM.2016.7540120","DOIUrl":null,"url":null,"abstract":"This paper provides experimental results for elimination of lateral-wave spurious modes observed in switchable ferroelectric BST-on-Si composite FBARs using a frame design technique. This approach is used in piezoelectric FBAR design, however here it is applied for the first time to design intrinsically switchable ferroelectric BST acoustic resonators. The BST-on-Si composite FBAR presented here is a structure with the dispersion type-I characteristic, which requires a raised frame to eliminate any higher-order lateral-wave spurious modes. Based on 2-D Multiphysics simulations, FBARs with and without a frame are designed, verifying the utility of using a frame to improve device performance. Both FBARs are fabricated and measured, and then their performance is compared. Measurement results validate the effectiveness of a frame in the design of switchable BST FBARs, allowing for device performance improvement.","PeriodicalId":6554,"journal":{"name":"2016 IEEE MTT-S International Microwave Symposium (IMS)","volume":"15 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"Lateral-wave spurious-modes elimination in switchable ferroelectric BST-on-Si composite FBARs\",\"authors\":\"Seungku Lee, M. Koohi, A. Mortazawi\",\"doi\":\"10.1109/MWSYM.2016.7540120\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper provides experimental results for elimination of lateral-wave spurious modes observed in switchable ferroelectric BST-on-Si composite FBARs using a frame design technique. This approach is used in piezoelectric FBAR design, however here it is applied for the first time to design intrinsically switchable ferroelectric BST acoustic resonators. The BST-on-Si composite FBAR presented here is a structure with the dispersion type-I characteristic, which requires a raised frame to eliminate any higher-order lateral-wave spurious modes. Based on 2-D Multiphysics simulations, FBARs with and without a frame are designed, verifying the utility of using a frame to improve device performance. Both FBARs are fabricated and measured, and then their performance is compared. Measurement results validate the effectiveness of a frame in the design of switchable BST FBARs, allowing for device performance improvement.\",\"PeriodicalId\":6554,\"journal\":{\"name\":\"2016 IEEE MTT-S International Microwave Symposium (IMS)\",\"volume\":\"15 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-05-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 IEEE MTT-S International Microwave Symposium (IMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MWSYM.2016.7540120\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE MTT-S International Microwave Symposium (IMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MWSYM.2016.7540120","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Lateral-wave spurious-modes elimination in switchable ferroelectric BST-on-Si composite FBARs
This paper provides experimental results for elimination of lateral-wave spurious modes observed in switchable ferroelectric BST-on-Si composite FBARs using a frame design technique. This approach is used in piezoelectric FBAR design, however here it is applied for the first time to design intrinsically switchable ferroelectric BST acoustic resonators. The BST-on-Si composite FBAR presented here is a structure with the dispersion type-I characteristic, which requires a raised frame to eliminate any higher-order lateral-wave spurious modes. Based on 2-D Multiphysics simulations, FBARs with and without a frame are designed, verifying the utility of using a frame to improve device performance. Both FBARs are fabricated and measured, and then their performance is compared. Measurement results validate the effectiveness of a frame in the design of switchable BST FBARs, allowing for device performance improvement.
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