本质可切换BST FBAR滤波器的线性度测量

2018 48th European Microwave Conference (EuMC) Pub Date : 2018-09-01 DOI:10.23919/EUMC.2018.8541805

M. Koohi, Suhyun Nam, A. Mortazawi

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引用次数: 0

摘要

研究了基于铁电钛酸钡锶(BST)的本质可切换薄膜体声波谐振器(FBAR)滤波器的线性度。设计并制作了一种2.5级阶梯式BST FBAR滤波器，该滤波器在2.2 GHz中心频率下的插入损耗为4.3 dB，分数带宽为2.5%。进行三阶截距点$(\mathbf{IP}_{\mathbf{3}})$测量以表征滤波器的线性度。该滤波器的测量值$\mathbf{IIP}_{3}$为47 dBm。

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Linearity Measurements of Intrinsically Switchable BST FBAR Filters

The linearity of intrinsically switchable thin film bulk acoustic wave resonator (FBAR) filters based on ferroelectric barium strontium titanate (BST) is investigated. A 2.5 stage ladder type BST FBAR filter is designed and fabricated with an insertion loss of 4.3 dB and a fractional bandwidth of 2.5% at the center frequency of 2.2 GHz. Third-order intercept point $(\mathbf{IP}_{\mathbf{3}})$ measurements are conducted to characterize the linearity of the filter. The measured $\mathbf{IIP}_{3}$ value for the filter is 47 dBm.

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2018 48th European Microwave Conference (EuMC)

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