H. Funakubo, S. Yasui, K. Yazawa, J. Nagata, T. Oikawa, T. Yamada, H. Uchida
{"title":"用于硅基MEMS的新型无铅、无锂、无钠、无钾压电材料的研制","authors":"H. Funakubo, S. Yasui, K. Yazawa, J. Nagata, T. Oikawa, T. Yamada, H. Uchida","doi":"10.1109/ISAF.2012.6297769","DOIUrl":null,"url":null,"abstract":"We developed the piezoelectric materials not including Pb, Li, K and Na as constituent elements. Our concern is the composition survey of the morphotropic phase boundary between tetragonal and non-tetragonal ferroelectric materials. In this approach, we must select the tetragonal ferroelectrics other than PbTiO<sub>3</sub> and (Bi<sub>1/2</sub>K<sub>1/2</sub>)TiO<sub>3</sub> as a end material. BiCoO<sub>3</sub> and Bi(Zn<sub>1/2</sub>Ti<sub>1/2</sub>)O<sub>3</sub> are novel tetragonal candidates for this purpose. We successfully grew epitaxial tetragonal films having ferroelectricity in BiCoO<sub>3</sub>-BiFeO<sub>3</sub> and Bi(Zn<sub>1/2</sub>Ti<sub>1/2</sub>)O<sub>3</sub>-BiFeO<sub>3</sub> systems. Based on these system, composition having maximum piezoelectric response of d<sub>33(AFM)</sub> = 280 pm/V was discovered for epitaxial films in Bi(Zn<sub>1/2</sub>Ti<sub>1/2</sub>)O<sub>3</sub>-Bi(Mg<sub>1/2</sub>Ti<sub>1/2</sub>)O<sub>3</sub>-BiFeO<sub>3</sub> system.","PeriodicalId":20497,"journal":{"name":"Proceedings of ISAF-ECAPD-PFM 2012","volume":"23 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Development of novel Pb, Li, Na and K-free piezoelectric materials for Si-based MEMS application\",\"authors\":\"H. Funakubo, S. Yasui, K. Yazawa, J. Nagata, T. Oikawa, T. Yamada, H. Uchida\",\"doi\":\"10.1109/ISAF.2012.6297769\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We developed the piezoelectric materials not including Pb, Li, K and Na as constituent elements. Our concern is the composition survey of the morphotropic phase boundary between tetragonal and non-tetragonal ferroelectric materials. In this approach, we must select the tetragonal ferroelectrics other than PbTiO<sub>3</sub> and (Bi<sub>1/2</sub>K<sub>1/2</sub>)TiO<sub>3</sub> as a end material. BiCoO<sub>3</sub> and Bi(Zn<sub>1/2</sub>Ti<sub>1/2</sub>)O<sub>3</sub> are novel tetragonal candidates for this purpose. We successfully grew epitaxial tetragonal films having ferroelectricity in BiCoO<sub>3</sub>-BiFeO<sub>3</sub> and Bi(Zn<sub>1/2</sub>Ti<sub>1/2</sub>)O<sub>3</sub>-BiFeO<sub>3</sub> systems. Based on these system, composition having maximum piezoelectric response of d<sub>33(AFM)</sub> = 280 pm/V was discovered for epitaxial films in Bi(Zn<sub>1/2</sub>Ti<sub>1/2</sub>)O<sub>3</sub>-Bi(Mg<sub>1/2</sub>Ti<sub>1/2</sub>)O<sub>3</sub>-BiFeO<sub>3</sub> system.\",\"PeriodicalId\":20497,\"journal\":{\"name\":\"Proceedings of ISAF-ECAPD-PFM 2012\",\"volume\":\"23 1\",\"pages\":\"1-2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-07-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of ISAF-ECAPD-PFM 2012\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2012.6297769\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISAF-ECAPD-PFM 2012","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2012.6297769","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Development of novel Pb, Li, Na and K-free piezoelectric materials for Si-based MEMS application
We developed the piezoelectric materials not including Pb, Li, K and Na as constituent elements. Our concern is the composition survey of the morphotropic phase boundary between tetragonal and non-tetragonal ferroelectric materials. In this approach, we must select the tetragonal ferroelectrics other than PbTiO3 and (Bi1/2K1/2)TiO3 as a end material. BiCoO3 and Bi(Zn1/2Ti1/2)O3 are novel tetragonal candidates for this purpose. We successfully grew epitaxial tetragonal films having ferroelectricity in BiCoO3-BiFeO3 and Bi(Zn1/2Ti1/2)O3-BiFeO3 systems. Based on these system, composition having maximum piezoelectric response of d33(AFM) = 280 pm/V was discovered for epitaxial films in Bi(Zn1/2Ti1/2)O3-Bi(Mg1/2Ti1/2)O3-BiFeO3 system.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
