氧化击穿场加速——精确的阳极孔注入模型能否解决E与1/E的争议?

2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059) Pub Date : 2000-04-10 DOI:10.1109/RELPHY.2000.843886

M. A. Alam, J. Bude, A. Ghetti

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引用次数: 109

摘要

一个简单的模型，基于阳极孔注入的概念，解释了一些令人困惑的测量氧化寿命作为施加电压的函数。我们提供这些测量的系统解释，并探讨其对栅氧化物可靠性的影响。

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Field acceleration for oxide breakdown-can an accurate anode hole injection model resolve the E vs. 1/E controversy?

A simple model, based on the concept of Anode Hole Injection, explains a number of puzzling measurements of oxide lifetime as a function of applied voltage. We provide systematic explanations of these measurements, and explore its implications for gate oxide reliability.

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2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059)

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