In/Se双分子层热退火生长硒化铟薄膜

R. Panda, U. Singh, R. Naik, N. Mishra
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引用次数: 2

摘要

采用热蒸发法在玻璃基板上制备了In/Se薄膜,并在200℃下退火1 h。x射线衍射分析和拉曼光谱分析均证实了退火过程中铟向硒基体扩散形成了In2Se3、In4Se3等硒化铟相。紫外可见光谱研究表明,由于不同的相形成,退火后的光学带隙减小。用FESEM表征了纳米棒状结构在制备膜中的形成及其退火后的消失。采用热蒸发法在玻璃基板上制备了In/Se薄膜,并在200℃下退火1 h。x射线衍射分析和拉曼光谱分析均证实了退火过程中铟向硒基体扩散形成了In2Se3、In4Se3等硒化铟相。紫外可见光谱研究表明,由于不同的相形成,退火后的光学带隙减小。用FESEM表征了纳米棒状结构在制备膜中的形成及其退火后的消失。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Growth of indium selenide thin films by thermal annealing of In/Se bilayer
The In/Se thin films were prepared by thermal evaporation method on glass substrate and were annealed at 200 °C for 1 hr. The indium diffusion into selenium matrix to form indium selenide phases like In2Se3, In4Se3 due to annealing was revealed from the X-ray diffraction study and also supported by the Raman spectra analysis. The optical band gap decreased with annealing as a result of different phase formation as studied from UV-visible spectroscopy. The formation of nano rod like structure in the as-prepared film and their disappearance upon annealing is probed by FESEM characterization.The In/Se thin films were prepared by thermal evaporation method on glass substrate and were annealed at 200 °C for 1 hr. The indium diffusion into selenium matrix to form indium selenide phases like In2Se3, In4Se3 due to annealing was revealed from the X-ray diffraction study and also supported by the Raman spectra analysis. The optical band gap decreased with annealing as a result of different phase formation as studied from UV-visible spectroscopy. The formation of nano rod like structure in the as-prepared film and their disappearance upon annealing is probed by FESEM characterization.
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