快速热退火对太阳能电池用热蒸发CdSe薄膜的影响

H. Kumar, Mangej Singh
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引用次数: 0

摘要

在10-5 torr的压力下,采用热真空蒸发法在清洁的玻璃衬底上沉积了硒化镉(CdSe)薄膜。这些CdSe薄膜也被保存在一个夸脱的玻璃管中,使用500 W卤素灯在60和120秒下进行快速热退火。这些薄膜具有结构、光学和热电性能。利用紫外-可见-近红外光谱进行了光学研究,发现沉积薄膜的直接带隙分别为1.74、1.70和1.67 eV,分别为沉积、60秒和120秒退火薄膜。随着退火时间的延长,吸光度增加,透射率降低,消光系数随能量的变化也得到了测量。热电功率(TEP)研究证实了CdSe薄膜的n型性质,但随着退火时间的增加,空穴浓度增加,导致CdSe薄膜的n型性质向p型性质转变,不同退火时间在沉积态(RT)、60秒和120秒时的Seebeck系数分别为549、949和1031 μV/K。SEM结果表明,随着退火时间的延长,晶粒尺寸和表面粗糙度增大。x射线衍射(XRD)研究表明,薄膜呈立方晶体结构,平均晶粒尺寸D为16.44 nm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of Rapid Thermal Annealing on Thermal Evaporated CdSe Thin Film for Solar Cell Application
Cadmium Selenide (CdSe) thin films have been deposited on a cleaned glass substrate by thermal vacuum evaporation method under the pressure of 10-5 torr. These CdSe thin films were also kept into a quart glass tube for rapid thermal annealing at 60 and 120 second using a 500 W halogen lamp for crystalline the structure. These thin films were characterized for structural, optical and thermo-electrical properties. The optical studies have been done using UV-VIS-NIR, shows that the transition of the deposited film is found to be a direct band gap of 1.74, 1.70 and 1.67 eV for asdeposited, 60 sec and 120 sec annealed thin films respectively. It was also found that absorbance has increased and transmission decreased with increasing annealing time, the change in the extinction coefficient with energy (hν) has been also measured. The Thermoelectric power (TEP) studies confirm the n-type nature of CdSe thin films but as well as annealing time increased the hole concentration increased resultant n-nature of CdSe thin film changing toward p-type nature, the Seebeck coefficient for different annealing time at as-deposited (RT), 60 seconds and 120 seconds have observed 549, 949 and 1031 μV/K respectively. The SEM result shows that with increasing annealing time the grain size and roughness of surface are increased. X-ray diffraction (XRD) studies indicate that the film is like a cubic crystal structure with average crystalline size (D) was measured using Scherrer formula and it is 16.44 nm.
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