PZT薄膜中相形成的控制机制

Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics Pub Date : 1994-08-07 DOI:10.1109/ISAF.1994.522400

S. Majumder, D. C. Agrawal, Y. N. Mohapatra, V. N. Kulkarni

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引用次数: 0

摘要

研究了溶胶-凝胶法制备PZT薄膜中钙钛矿相形成的控制因素。钙钛矿很容易在蓝宝石、多晶Al/sub 2/O/sub 3/和NaCl上形成薄膜，但只能在石英、玻璃和Si上形成相对较厚的薄膜。(a)低Zr/Ti比和高Pb含量的薄膜，(b)快速加热到退火温度的薄膜和(c)在N/sub / ambient中退火的薄膜也有利于钙钛矿相的形成。RBS研究表明，由于界面上的反应或扩散到界面上，铅的大量缺乏性出现在停留在焦绿石结构中的膜中。从非晶到焦绿石的初始转变被认为是由于非晶/spl rarr/钙钛矿转变的应变能垒增强。

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Mechanisms controlling phase formation in PZT thin films

Factors controlling the formation of the perovskite phase in sol-gel prepared PZT film were studied. Perovskite was found to form quite easily, even in very thin films on sapphire, polycrystalline Al/sub 2/O/sub 3/ and NaCl but only in relatively thick films on quartz, glass and Si. Formation of the perovskite phase is also favoured in (a) films with low Zr/Ti ratio and high Pb content, (b) films heated rapidly to annealing temperature and (c) films annealed in N/sub 2/ ambient. RBS studies show that large deficiency of Pb develops in films which remain in the pyrochlore structure due to reaction at the interface or due to diffusion into the interface. The initial transformation from amorphous to pyrochlore is believed to be due to enhanced strain energy barrier for the amorphous/spl rarr/perovskite transformation.

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Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics

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