用于纳米精密传感与定位的滑动接触微轴承

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-09-24 DOI:10.1109/SENSOR.2007.4300476

N. Ramakrishnan, E. Johns, Yongjun Zhao, J. Kiely, M. Bedillion, P. Chu

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引用次数: 7

摘要

涉及亚纳米的应用，相对的，在两个衬底之间的平面运动需要精确控制衬底之间的间隙间距，无论是位置传感，以及衬底之间的信号转导。提出了一种利用mems制造的刚性间隔片进行无源间隙控制的方法。建立了一种设计滑动基板间低摩擦低磨损界面的模型。制造和测试了具有硬涂层界面和有无润滑的原型零件。在原型零件上实现了0.1 ~ 0.15或更小的滑动摩擦系数和数百万次滑动循环的磨损寿命。更好的结果预测MEMS-scale设备。

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Sliding Contact Micro-Bearing for Nano-Precision Sensing and Positioning

Applications involving sub-nanometer, relative, in-plane motion between two substrates require precise control of gap-spacing between substrates for, both position-sensing as well as for signal transduction between the substrates. A method of passive gap-spacing control using MEMS-fabricated rigid spacers is proposed. A model to design a low-friction and low-wear interface between the sliding substrates is developed. Prototype parts with hard-coated interfaces and with and without lubrication were fabricated and tested. Sliding friction coefficients of 0.1-0.15 or less and wear life of millions of sliding cycles were achieved on prototype parts. Better results are predicted for MEMS-scale devices.

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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