基于亚波长预应力微悬臂的超材料对太赫兹波的有效操纵

2015 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP) Pub Date : 2015-07-01 DOI:10.1109/IMWS-AMP.2015.7324981

Prakash Pitchappa, C. Ho, Chengkuo Lee

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引用次数: 0

摘要

我们报道了一组预应力MEMS悬臂梁作为太赫兹波动态操纵的主动超材料。将静电驱动的微悬臂集成到分环谐振器和电分环谐振器单元中，进一步实现了磁谐振和电谐振的主动调谐。采用电热法和流体流动法扩展了这些双材料悬臂梁的驱动方法。简单的MEMS微悬臂梁具有高度通用性，具有吸引人的电光响应，并为未来的许多太赫兹应用提供了技术平台。

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Subwavelength prestressed microcantilevers based metamaterials for efficient manipulation of terahertz waves

We report an array of prestressed MEMS cantilever as active metamaterial for dynamic manipulation of terahertz waves. The electrostatically actuated microcantilevers integrated into split ring resonator and electrical split ring resonator unit cell, further enables active tuning of magnetic and electrical resonance, respectively. The actuation method of these bimaterial cantilevers is expanded using electrothermal and fluid flow methods. The simple MEMS microcantilevers is highly versatile with attractive electro-optic response and forms a technology platform for numerous terahertz applications in the future.

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2015 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)

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