基于LTCC技术的无源无线气体传感器

Mingsheng Ma, Zhifu Liu, Wei Shan, Yongxiang Li, K. Kalantar-zadeh, W. Wlodarski
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引用次数: 6

摘要

许多现有的气体传感器不能提供长期连续的性能,使得它们在环境和护理点监测任务中选择无效。这个问题可能是由于其操作和信号通信的可访问电源的限制而产生的。为此,本文提出了一种基于低温共烧陶瓷(LTCC)技术的无线无源气体传感器。该传感器由一个平面电感-数字间电容谐振天线电路组成,表面覆盖气敏涂层。天线和这对数字间电极是用LTCC工艺制造的。采用滴铸法制备了二维二硫化锡(SnS2)纳米结构的气敏薄膜。通过监测天线在不同气体类型和浓度下的阻抗相位角变化,研究了天线的气敏性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Passive wireless gas sensors based on the LTCC technique
Many of the existing gas sensors cannot offer long-term continuous performance, rendering them selected ineffective for environmental and point-of-care monitoring tasks. The problem may arise from the limitation in accessible power supplies for their operation and signal communications. As a solution, a wireless passive gas sensor based on low temperature co-fired ceramic (LTCC) technology is presented in this work. The sensor consists of a planar inductor-interdigital capacitor resonant antenna circuit, covered with gas sensitive coatings. The antenna together with this pair of interdigital electrodes was fabricated using the LTCC process. Gas sensitive films were made of two dimensional tin disulfide (SnS2) nanostructures, which were deposited on the interdigital electrodes by drop-casting method. The gas sensing performance was investigated by monitoring the impedance phase angle changes of the antenna in response to different gas types and concentrations.
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