{"title":"Ga2O3材料及其应用前景","authors":"D. Rogers, F. Teherani, P. Bove, É. Sandana","doi":"10.1117/12.2601744","DOIUrl":null,"url":null,"abstract":"Recently, there has been a surge in interest for the ultra wide bandgap (Eg ~ 4.9 eV) semiconductor gallium oxide (Ga2O3). A key driver for this boom is that single crystal wide area bulk β-Ga2O3 substrates have become commercially available and a variety of methods have been shown to give high quality epitaxial growth. \nAlthough Ga2O3 has a number of polymorph forms (α-, β-, γ-, δ- and e) the more stable monoclinic phase (β-Ga2O3) has attracted the most attention. Amongst a whole range of potential applications power/switching electronics, solar-blind photodetectors and solar transparent electrodes offer exciting perspectives. \nIn this talk we give an overview of these applications illustrated with examples from the β-Ga2O3 development work carried out at the French oxide semiconductor epiwafer company, Nanovation, www.nanovation.com.","PeriodicalId":23471,"journal":{"name":"UV and Higher Energy Photonics: From Materials to Applications 2021","volume":"57 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2021-08-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Materials and applications perspectives for Ga2O3\",\"authors\":\"D. Rogers, F. Teherani, P. Bove, É. Sandana\",\"doi\":\"10.1117/12.2601744\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Recently, there has been a surge in interest for the ultra wide bandgap (Eg ~ 4.9 eV) semiconductor gallium oxide (Ga2O3). A key driver for this boom is that single crystal wide area bulk β-Ga2O3 substrates have become commercially available and a variety of methods have been shown to give high quality epitaxial growth. \\nAlthough Ga2O3 has a number of polymorph forms (α-, β-, γ-, δ- and e) the more stable monoclinic phase (β-Ga2O3) has attracted the most attention. Amongst a whole range of potential applications power/switching electronics, solar-blind photodetectors and solar transparent electrodes offer exciting perspectives. \\nIn this talk we give an overview of these applications illustrated with examples from the β-Ga2O3 development work carried out at the French oxide semiconductor epiwafer company, Nanovation, www.nanovation.com.\",\"PeriodicalId\":23471,\"journal\":{\"name\":\"UV and Higher Energy Photonics: From Materials to Applications 2021\",\"volume\":\"57 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-08-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"UV and Higher Energy Photonics: From Materials to Applications 2021\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2601744\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"UV and Higher Energy Photonics: From Materials to Applications 2021","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2601744","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Recently, there has been a surge in interest for the ultra wide bandgap (Eg ~ 4.9 eV) semiconductor gallium oxide (Ga2O3). A key driver for this boom is that single crystal wide area bulk β-Ga2O3 substrates have become commercially available and a variety of methods have been shown to give high quality epitaxial growth.
Although Ga2O3 has a number of polymorph forms (α-, β-, γ-, δ- and e) the more stable monoclinic phase (β-Ga2O3) has attracted the most attention. Amongst a whole range of potential applications power/switching electronics, solar-blind photodetectors and solar transparent electrodes offer exciting perspectives.
In this talk we give an overview of these applications illustrated with examples from the β-Ga2O3 development work carried out at the French oxide semiconductor epiwafer company, Nanovation, www.nanovation.com.