Ga2O3材料及其应用前景

D. Rogers, F. Teherani, P. Bove, É. Sandana
{"title":"Ga2O3材料及其应用前景","authors":"D. Rogers, F. Teherani, P. Bove, É. Sandana","doi":"10.1117/12.2601744","DOIUrl":null,"url":null,"abstract":"Recently, there has been a surge in interest for the ultra wide bandgap (Eg ~ 4.9 eV) semiconductor gallium oxide (Ga2O3). A key driver for this boom is that single crystal wide area bulk β-Ga2O3 substrates have become commercially available and a variety of methods have been shown to give high quality epitaxial growth. \nAlthough Ga2O3 has a number of polymorph forms (α-, β-, γ-, δ- and e) the more stable monoclinic phase (β-Ga2O3) has attracted the most attention. Amongst a whole range of potential applications power/switching electronics, solar-blind photodetectors and solar transparent electrodes offer exciting perspectives. \nIn this talk we give an overview of these applications illustrated with examples from the β-Ga2O3 development work carried out at the French oxide semiconductor epiwafer company, Nanovation, www.nanovation.com.","PeriodicalId":23471,"journal":{"name":"UV and Higher Energy Photonics: From Materials to Applications 2021","volume":"57 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2021-08-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Materials and applications perspectives for Ga2O3\",\"authors\":\"D. Rogers, F. Teherani, P. Bove, É. Sandana\",\"doi\":\"10.1117/12.2601744\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Recently, there has been a surge in interest for the ultra wide bandgap (Eg ~ 4.9 eV) semiconductor gallium oxide (Ga2O3). A key driver for this boom is that single crystal wide area bulk β-Ga2O3 substrates have become commercially available and a variety of methods have been shown to give high quality epitaxial growth. \\nAlthough Ga2O3 has a number of polymorph forms (α-, β-, γ-, δ- and e) the more stable monoclinic phase (β-Ga2O3) has attracted the most attention. Amongst a whole range of potential applications power/switching electronics, solar-blind photodetectors and solar transparent electrodes offer exciting perspectives. \\nIn this talk we give an overview of these applications illustrated with examples from the β-Ga2O3 development work carried out at the French oxide semiconductor epiwafer company, Nanovation, www.nanovation.com.\",\"PeriodicalId\":23471,\"journal\":{\"name\":\"UV and Higher Energy Photonics: From Materials to Applications 2021\",\"volume\":\"57 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-08-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"UV and Higher Energy Photonics: From Materials to Applications 2021\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2601744\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"UV and Higher Energy Photonics: From Materials to Applications 2021","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2601744","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

最近,人们对超宽带隙(Eg ~ 4.9 eV)半导体氧化镓(Ga2O3)的兴趣激增。这种繁荣的一个关键驱动因素是单晶广域体β-Ga2O3衬底已经商品化,各种方法已经被证明可以提供高质量的外延生长。虽然Ga2O3具有多种晶型(α-、β-、γ-、δ-和e),但更稳定的单斜相(β-Ga2O3)引起了人们的广泛关注。在一系列潜在的应用中,电源/开关电子,太阳盲光电探测器和太阳能透明电极提供了令人兴奋的前景。在本次演讲中,我们将以法国氧化物半导体epiwafer公司Nanovation (www.nanovation.com)的β-Ga2O3开发工作为例,对这些应用进行概述。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Materials and applications perspectives for Ga2O3
Recently, there has been a surge in interest for the ultra wide bandgap (Eg ~ 4.9 eV) semiconductor gallium oxide (Ga2O3). A key driver for this boom is that single crystal wide area bulk β-Ga2O3 substrates have become commercially available and a variety of methods have been shown to give high quality epitaxial growth. Although Ga2O3 has a number of polymorph forms (α-, β-, γ-, δ- and e) the more stable monoclinic phase (β-Ga2O3) has attracted the most attention. Amongst a whole range of potential applications power/switching electronics, solar-blind photodetectors and solar transparent electrodes offer exciting perspectives. In this talk we give an overview of these applications illustrated with examples from the β-Ga2O3 development work carried out at the French oxide semiconductor epiwafer company, Nanovation, www.nanovation.com.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信