薄涂层的压痕:理论和实验研究

S. Aizikovich, A. Nikolaev, E. Sadyrin, L. Krenev, V. Irkha, A. Galybin
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引用次数: 0

摘要

提出了一种有效的数学模型来描述层状或功能梯度涂层样品的压痕实验。该方法是在求解带涂层弹性半空间冲床压痕弹性理论接触问题的基础上建立的。对脉冲激光沉积法制备ZnO薄膜压痕的数学模型和实验结果进行了比较。研究了涂层的微观几何特性和化学成分。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
INDENTATION OF THIN COATINGS: THEORETICAL AND EXPERIMENTAL INVESTIGATION
An effective mathematical model is proposed for describing the experiment on indentation of samples with layered or functionally graded coatings. It is based on the solution of the contact problem of the theory of elasticity of indentation of a punch into elastic half-space with a coating. The results of mathematical modelling and experiments on indentation of the ZnO coating manufactured by the method of pulsed laser deposition on a silicon substrate are compared. The microgeometrical characteristics, as well as the chemical composition of the coating, were studied.
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CiteScore
1.20
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