基于半导体衬底薄膜谐振器的超高频和l波段振荡器的设计与性能

[1991] Proceedings of the 34th Midwest Symposium on Circuits and Systems Pub Date : 1991-05-14 DOI:10.1109/MWSCAS.1991.252038

S. Burns, R. Weber

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引用次数: 1

摘要

作者报告了使用溅射沉积的薄膜氮化铝谐振器作为混合单模、组合和压控UHF和l波段振荡器的反馈元件。谐振器还与2 ghz双极结晶体管(bjt)在同一衬底上协集成。提出了使用该技术的新型体系结构的设计技术和建议

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Design and performance of UHF and L-band oscillators using thin-film resonators on semiconductor substrates

The authors report on the use of sputter-deposited, thin-film, aluminum nitride resonators as the feedback element in hybrid single-mode, combline, and voltage-controlled UHF and L-band oscillators. The resonators have also been cointegrated on the same substrate with 2-GHz BJTs (bipolar junction transistors). Design techniques and suggestions for novel architectures using this technology are presented.<>

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[1991] Proceedings of the 34th Midwest Symposium on Circuits and Systems

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