多晶硅熔断器电气空化机构AP/DFM:可制造性的高级图样/设计

Gang Liu, Rommel Relos, Bohumil Janik, Robert Davis, T. Myers, D. Allman, Jeff Hall, S. Vandeweghe, S. Menon, Ed Flanigan
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引用次数: 0

摘要

汽车应用中的产品需要多晶硅熔断器一次性可编程(OTP)解决方案,故障率极低。对编程机制和关键设计/编程因素的基本理解是实现这一目标不可或缺的。本文提出了一种以波形、仿真和物理分析数据为支撑的实时聚熔断模型。分析了熔断器设计和编程条件变化的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Polysilicon Fuse Electrical Voiding Mechanism AP/DFM: Advanced Patterning / Design for Manufacturability
Products in automotive applications demand polysilicon fuse One-time programmable (OTP) solutions with extremely low failure rates. Fundamental understanding of the programming mechanism and key design/programming factors are indispensable to achieving such a goal. This paper presents a real-time poly fuse voiding model supported by electrical waveforms, simulations and physical analysis data. Impacts of fuse design and programming condition changes are also examined.
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