Gang Liu, Rommel Relos, Bohumil Janik, Robert Davis, T. Myers, D. Allman, Jeff Hall, S. Vandeweghe, S. Menon, Ed Flanigan
{"title":"多晶硅熔断器电气空化机构AP/DFM:可制造性的高级图样/设计","authors":"Gang Liu, Rommel Relos, Bohumil Janik, Robert Davis, T. Myers, D. Allman, Jeff Hall, S. Vandeweghe, S. Menon, Ed Flanigan","doi":"10.1109/ASMC49169.2020.9185389","DOIUrl":null,"url":null,"abstract":"Products in automotive applications demand polysilicon fuse One-time programmable (OTP) solutions with extremely low failure rates. Fundamental understanding of the programming mechanism and key design/programming factors are indispensable to achieving such a goal. This paper presents a real-time poly fuse voiding model supported by electrical waveforms, simulations and physical analysis data. Impacts of fuse design and programming condition changes are also examined.","PeriodicalId":6771,"journal":{"name":"2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","volume":"15 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2020-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Polysilicon Fuse Electrical Voiding Mechanism AP/DFM: Advanced Patterning / Design for Manufacturability\",\"authors\":\"Gang Liu, Rommel Relos, Bohumil Janik, Robert Davis, T. Myers, D. Allman, Jeff Hall, S. Vandeweghe, S. Menon, Ed Flanigan\",\"doi\":\"10.1109/ASMC49169.2020.9185389\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Products in automotive applications demand polysilicon fuse One-time programmable (OTP) solutions with extremely low failure rates. Fundamental understanding of the programming mechanism and key design/programming factors are indispensable to achieving such a goal. This paper presents a real-time poly fuse voiding model supported by electrical waveforms, simulations and physical analysis data. Impacts of fuse design and programming condition changes are also examined.\",\"PeriodicalId\":6771,\"journal\":{\"name\":\"2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)\",\"volume\":\"15 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASMC49169.2020.9185389\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC49169.2020.9185389","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Products in automotive applications demand polysilicon fuse One-time programmable (OTP) solutions with extremely low failure rates. Fundamental understanding of the programming mechanism and key design/programming factors are indispensable to achieving such a goal. This paper presents a real-time poly fuse voiding model supported by electrical waveforms, simulations and physical analysis data. Impacts of fuse design and programming condition changes are also examined.