工序转角测定的统计方法

M. Kocher, G. Rappitsch
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引用次数: 6

摘要

提出了一种统计方法,通过寻找分布边界上具有参数值的晶圆,来确定MOS晶体管生产过程的变化。对于晶圆的选择,采用了位置深度法。由于确定所有晶圆的SPICE参数并计算SPICE域中的边界晶圆过于耗时,因此我们使用了不同的方法。根据生产控制参数计算边界晶圆,然后将生产控制参数值转换为SPICE参数值。通过这种方式获得的SPICE参数值进行了电路模拟,由于我们使用了边界晶圆的数据,因此我们涵盖了一定时间段内生产过程的变化。通过少量的仿真,证明了该方案能够非常准确地描述模拟/混合信号设计的性能变化。为了验证的目的,电路仿真和基准电路的测量进行了比较。统计方法可以很容易地集成到混合信号设计环境中。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Statistical methods for the determination of process corners
Presents a statistical method to determine the variation of the production process of MOS transistors by finding the wafers that have parameter values on the boundary of the distribution. For the selection of the wafers a location depth method is used. Since it would be too time-consuming to determine the SPICE parameters for all the wafers and compute the boundary wafers in the SPICE domain, we use a different approach. We compute the boundary wafers based on production control parameters and then we transform the production control parameter values to SPICE parameter values. With the SPICE parameter values obtained in this way the circuit simulation is performed and since we use the data of the boundary wafers, we cover the variation of the production process within a certain time period. The applied scheme proves to describe the performance variation of analog/mixed-signal designs very accurately with a small number of simulations. For validation purposes circuit simulations and measurements of benchmark circuits are compared. The statistical methods can easily be integrated into a mixed-signal design environment.
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