AFM探针下电化学反应生长硅片上的Al2O3纳米线

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI:10.1109/NEMS.2006.334871

Xiang Geng, Z. Jiao, Haobo Wang, Qun Fu, Haijian Zhong, Zhen Li

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引用次数: 2

摘要

在AFM探针下，通过电化学反应在硅片上生长Al2O3纳米线。制备的Al2O3纳米线排列整齐，其长度和宽度可通过调节AFM探针的加载电压和扫描速率来控制

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The Al2O3 nanowire grown on silicon chips by electrochemical reaction under AFM probe

In this paper the Al₂O₃ nanowire is grown on silicon chips by electrochemical reaction under AFM probe. The obtained Al₂O₃ nanowire is regular arranged, the length and width of the nanowire can be controlled by adjusting applied voltage and scanning rate of AFM probe

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2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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