用于冷原子光谱的动态稳定高真空铷蒸气MEMS电池

2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2019-12-01 DOI:10.1109/PowerMEMS49317.2019.71805313239

P. Knapkiewicz, T. Grzebyk

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引用次数: 0

摘要

提出了一种独特的微动力、全功能MEMS冷原子光谱器件解决方案。这里描述的解决方案可能对立方体卫星技术特别有价值，因为立方体卫星技术绝对需要低功耗、小尺寸和轻重量。MEMS器件是一种多层硅玻璃结构。该结构的关键部件是组装在硅-玻璃平面结构上的优质玻璃管。采用离子吸收微泵和激光诱导碱蒸气引入的方法构建了该MEMS器件。试验表明，在功率需求约为1 mW的情况下，可以产生和保持高真空$(10^{-7}$ hPa)并控制碱蒸气的数量$(\sim 10^{-6}$ hPa)。这一成就为构建用于原子器件(包括冷原子光谱)的微动力、高真空碱蒸汽MEMS电池开辟了一条道路。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Dynamically stabilized high vacuum inside rubidium vapor MEMS cell for cold atom spectroscopy

The unique solution of micro-powered and fully functional MEMS device for cold atom spectroscopy is presented. The solution described here may be particularly valuable for CubeSats technology, where low power demand, small dimensions and low weight are absolutely required.The MEMS device is a multilayer silicon-glass structure. The key part of the structure is high-quality glass tube assembled onto silicon-glass planar structure. Ion-sorption micropump and laser induced alkali vapor introduction method were used to build this MEMS device.During tests it was shown that it is possible to generate and maintain a high vacuum $(10^{-7}$ hPa) and control the number of alkali vapors $(\sim 10^{-6}$ hPa), where the power demand was about 1 mW. This achievement opens a way to build micro-powered, high-vacuum alkali vapors MEMS cells for atomic devices, including cold atom spectroscopy.

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来源期刊

2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)

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