CMOS中纳米粉末磁芯垂直堆叠螺旋射频电感

2011 IEEE International Conference of Electron Devices and Solid-State Circuits Pub Date : 2011-12-29 DOI:10.1109/EDSSC.2011.6117668

J. Zhan, C. Yang, X. Wang, T. Ren, A. Wang, Y. Yang, L. T. Liu, L. Yang

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引用次数: 0

摘要

本文报道了一种在标准CMOS中集成纳米粉末磁芯的垂直堆叠螺旋射频电感的新概念。在0.18µm 6金属CMOS和后CMOS后端工艺模块(即CMOS+)中制作和测量了原型电感器。结果表明，在多ghz频率范围内，概念验证设计将电感L提高了34%，因数Q提高了62%。

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Nano-powder-magnetic-core vertically stacked-spiral RF inductor in CMOS

This paper reports a novel concept of vertically stacked-spiral RF inductor with integrated nano-powder-magnetic-core in standard CMOS. Prototype inductors in a foundry 0.18µm 6-metal CMOS and a post-CMOS backend process module (i.e., CMOS+) are fabricated and measured. Result shows the proof-of-concept designs greatly increase the inductance, L, by up to 34% and the factor, Q, by 62% over a multi-GHz frequency range.

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2011 IEEE International Conference of Electron Devices and Solid-State Circuits

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