具有有效应力释放框架的微机械陀螺仪

{"title":"具有有效应力释放框架的微机械陀螺仪","authors":"Yu Xin, Xuezhong Wu, D. Xiao, Z. Hou, Kun He, Zhihua Chen","doi":"10.1109/NEMS.2013.6559889","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":73285,"journal":{"name":"IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"32 1","pages":"994-997"},"PeriodicalIF":0.0000,"publicationDate":"2013-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A micromachined gyroscope with an effective stress-released frame\",\"authors\":\"Yu Xin, Xuezhong Wu, D. Xiao, Z. Hou, Kun He, Zhihua Chen\",\"doi\":\"10.1109/NEMS.2013.6559889\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":73285,\"journal\":{\"name\":\"IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"volume\":\"32 1\",\"pages\":\"994-997\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS.2013.6559889\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2013.6559889","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}