A. Michette, P. Prewett, A. K. Powell, S. Pfauntsch, K. Atkinson, B. Boonliang
{"title":"新型微结构自适应x射线光学","authors":"A. Michette, P. Prewett, A. K. Powell, S. Pfauntsch, K. Atkinson, B. Boonliang","doi":"10.1051/JP4:200300080","DOIUrl":null,"url":null,"abstract":"Advances in the techniques of micro- and nano-fabrication mean that it is now possible to design and make microstructured optical arrays (MOAs). Due to greater flexibility in the choice of channel geometry and layout, these offer much better performances than current grazing incidence optics, which are limited to circular, square or close-packed hexagonal channels. In addition, MOAs can have built-in adaptivity and controllable focal length - they can therefore act as zoom lenses. Potential applications include x-ray microprobing, EUV lithography and confocal x-ray microscopy.","PeriodicalId":14747,"journal":{"name":"Journal De Physique","volume":"27 1","pages":"277-280"},"PeriodicalIF":0.0000,"publicationDate":"2003-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":"{\"title\":\"Novel microstructured adaptive X-ray optics\",\"authors\":\"A. Michette, P. Prewett, A. K. Powell, S. Pfauntsch, K. Atkinson, B. Boonliang\",\"doi\":\"10.1051/JP4:200300080\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Advances in the techniques of micro- and nano-fabrication mean that it is now possible to design and make microstructured optical arrays (MOAs). Due to greater flexibility in the choice of channel geometry and layout, these offer much better performances than current grazing incidence optics, which are limited to circular, square or close-packed hexagonal channels. In addition, MOAs can have built-in adaptivity and controllable focal length - they can therefore act as zoom lenses. Potential applications include x-ray microprobing, EUV lithography and confocal x-ray microscopy.\",\"PeriodicalId\":14747,\"journal\":{\"name\":\"Journal De Physique\",\"volume\":\"27 1\",\"pages\":\"277-280\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"16\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal De Physique\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1051/JP4:200300080\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal De Physique","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1051/JP4:200300080","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Advances in the techniques of micro- and nano-fabrication mean that it is now possible to design and make microstructured optical arrays (MOAs). Due to greater flexibility in the choice of channel geometry and layout, these offer much better performances than current grazing incidence optics, which are limited to circular, square or close-packed hexagonal channels. In addition, MOAs can have built-in adaptivity and controllable focal length - they can therefore act as zoom lenses. Potential applications include x-ray microprobing, EUV lithography and confocal x-ray microscopy.
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