电荷捕获和缺陷产生引起的迁移率增强:自补偿BTI的物理学

A. Islam, M. Alam
{"title":"电荷捕获和缺陷产生引起的迁移率增强:自补偿BTI的物理学","authors":"A. Islam, M. Alam","doi":"10.1109/IRPS.2010.5488853","DOIUrl":null,"url":null,"abstract":"Threshold voltage VT of a transistor degrades with time both due to the formation of defects at the oxide/Si interface, as well as charge trapping into bulk defects - a phenomenon commonly known as Bias Temperature Instability (BTI). However, we have shown earlier that with appropriate mobility vs. vertical effective electric field characteristics, transistor's drivability (i.e., drain current) can be made far less sensitive to the NBTI-induced threshold voltage degradation ΔV T , than previously presumed. Higher steepness of the mobility-field characteristics results in an increase in mobility due to interface defects, which can self-compensate the effect of ΔV T on drain current. In this paper, for the first time we analyze the additional effect of PBTI-induced ΔV T in NMOS transistor parameters and show that mobility at constant gate voltage always increases with PBTI, irrespective of the mobility-field steepness. Therefore, self-compensation for PBTI is even more pronounced compared to NBTI. Next, we demonstrate the consequence of self-compensation via an intuitive analysis in simple digital circuits and show that lifetime of digital ICs increases dramatically once we incorporate the effect of self-compensation by using appropriate sign for mobility variation at constant gate voltage. This might in turn reduce the requirement of different circuit level optimization techniques, currently employed to manage transistor variabilities. Finally, we establish the importance of flatter transfer characteristics for self-compensation, which can be obtained through advanced CMOS technologies.","PeriodicalId":6387,"journal":{"name":"2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2010-05-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Mobility enhancement due to charge trapping & defect generation: Physics of self-compensated BTI\",\"authors\":\"A. Islam, M. Alam\",\"doi\":\"10.1109/IRPS.2010.5488853\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Threshold voltage VT of a transistor degrades with time both due to the formation of defects at the oxide/Si interface, as well as charge trapping into bulk defects - a phenomenon commonly known as Bias Temperature Instability (BTI). However, we have shown earlier that with appropriate mobility vs. vertical effective electric field characteristics, transistor's drivability (i.e., drain current) can be made far less sensitive to the NBTI-induced threshold voltage degradation ΔV T , than previously presumed. Higher steepness of the mobility-field characteristics results in an increase in mobility due to interface defects, which can self-compensate the effect of ΔV T on drain current. In this paper, for the first time we analyze the additional effect of PBTI-induced ΔV T in NMOS transistor parameters and show that mobility at constant gate voltage always increases with PBTI, irrespective of the mobility-field steepness. Therefore, self-compensation for PBTI is even more pronounced compared to NBTI. Next, we demonstrate the consequence of self-compensation via an intuitive analysis in simple digital circuits and show that lifetime of digital ICs increases dramatically once we incorporate the effect of self-compensation by using appropriate sign for mobility variation at constant gate voltage. This might in turn reduce the requirement of different circuit level optimization techniques, currently employed to manage transistor variabilities. Finally, we establish the importance of flatter transfer characteristics for self-compensation, which can be obtained through advanced CMOS technologies.\",\"PeriodicalId\":6387,\"journal\":{\"name\":\"2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-05-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.2010.5488853\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.2010.5488853","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5

摘要

晶体管的阈值电压VT随着时间的推移而降低,这是由于氧化物/硅界面缺陷的形成,以及电荷被捕获到大块缺陷中,这种现象通常被称为偏置温度不稳定性(BTI)。然而,我们之前已经表明,与垂直有效电场特性相比,适当的迁移率可以使晶体管的驱动性(即漏极电流)对nbti诱导的阈值电压退化ΔV T的敏感性远远低于先前的假设。迁移率场特征的陡度越高,由于界面缺陷导致迁移率增加,这可以自补偿ΔV T对漏极电流的影响。在本文中,我们首次分析了PBTI诱导的ΔV T对NMOS晶体管参数的附加影响,并表明恒定栅极电压下的迁移率总是随着PBTI而增加,而与迁移率场的陡峭度无关。因此,与NBTI相比,PBTI的自我补偿更为明显。接下来,我们通过简单数字电路的直观分析证明了自补偿的结果,并表明一旦我们通过在恒定栅极电压下使用适当的迁移率变化符号来纳入自补偿的影响,数字ic的寿命就会急剧增加。这可能反过来减少对不同电路级优化技术的需求,目前用于管理晶体管的可变性。最后,我们建立了通过先进的CMOS技术可以获得的平坦传递特性对自补偿的重要性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Mobility enhancement due to charge trapping & defect generation: Physics of self-compensated BTI
Threshold voltage VT of a transistor degrades with time both due to the formation of defects at the oxide/Si interface, as well as charge trapping into bulk defects - a phenomenon commonly known as Bias Temperature Instability (BTI). However, we have shown earlier that with appropriate mobility vs. vertical effective electric field characteristics, transistor's drivability (i.e., drain current) can be made far less sensitive to the NBTI-induced threshold voltage degradation ΔV T , than previously presumed. Higher steepness of the mobility-field characteristics results in an increase in mobility due to interface defects, which can self-compensate the effect of ΔV T on drain current. In this paper, for the first time we analyze the additional effect of PBTI-induced ΔV T in NMOS transistor parameters and show that mobility at constant gate voltage always increases with PBTI, irrespective of the mobility-field steepness. Therefore, self-compensation for PBTI is even more pronounced compared to NBTI. Next, we demonstrate the consequence of self-compensation via an intuitive analysis in simple digital circuits and show that lifetime of digital ICs increases dramatically once we incorporate the effect of self-compensation by using appropriate sign for mobility variation at constant gate voltage. This might in turn reduce the requirement of different circuit level optimization techniques, currently employed to manage transistor variabilities. Finally, we establish the importance of flatter transfer characteristics for self-compensation, which can be obtained through advanced CMOS technologies.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信