集成多晶硅电极的新型全硅传感器结构

L. Montelius, T. Ling, J. Tegenfeldt
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引用次数: 0

摘要

对现代化学和医学传感器小型化的兴趣正在稳步增长。然而,当采用专门为微电子开发的方法和制造程序时,在水介质中的应用可能会遇到新的和不可预测的问题。例如,在微电子学中,通常采用双金属层系统来制造电触点。在溶液中,这种接触可能导致电反应和/或溶解在用于医疗器械灭菌的清洗剂中。为了解决这些问题,作者采用了全硅基工艺技术来制造坚固可靠的设备,该设备具有集成的多晶硅电极,可以承受大多数化学环境。在这次演讲中,作者报告了使用这种电极的第一个结果。对相同的多晶硅电极和铝电极进行了对比研究,以考察多晶硅电极的实用性。作者还证明了很好的可能性,使用良好的记录方法,表面改性使用硅烷偶联化学。作者认为,与金属电极相比,硅基电极易于表面修饰过程的这一额外优势,对于开发用于特定应用的精确和定制传感器结构是非常有价值的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Novel all-silicon sensor structure with integrated poly-Si electrodes
The interest in miniaturization of modern chemical and medical sensors is steadily increasing. However, when employing methods and fabrication procedures especially developed for microelectronics, one may encounter new and unpredictable problems for applications in aqueous media. For instance, in microelectronics often a dual metal layer system is employed for making electrical contacts. In a solution such a contact may result in galvanic reactions and/or may dissolve in the cleaning agents used for sterilization of medical devices. To address such issues the authors have employed an all-silicon based process technology for fabrication of sturdy and reliable devices with integrated poly-Silicon electrodes that tolerate most chemical environments. In this presentation the authors report on the first results using such electrodes. A comparative study between identical poly-Si and Aluminium electrodes was made in order to investigate the usefulness of poly-Si electrodes. The authors also demonstrate the nice possibility to use well-documented methods for surface modifications using silane coupling chemistry. The authors believe this added benefit for the silicon based electrodes of easy surface modification processes, as compared with metal electrodes, to be extremely valuable for the development of accurate and tailored sensor structures for specific applications.
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