电弧- pvd TiAlSiY和(TiAlSiY)N涂层的特性

2017 IEEE 7th International Conference Nanomaterials: Application & Properties (NAP) Pub Date : 2017-09-01 DOI:10.1109/NAP.2017.8190195

Yaroslav O. Kravchenko, V. Borysiuk, A. Pogrebnjak, M. Kylyshkanov, I. Iatsunskyi, K. Smyrnova

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引用次数: 2

摘要

从结构工程的角度考虑了合成多元素纳米涂层的可能性。将得到的氮化涂层(TiAlSiY)N与四组分合金TiAlSiY进行比较，评估反应气体对结构相组成和力学参数的影响。采用x射线衍射(XRD)、扫描电镜(SEM)和硬度测量技术对镀层进行了研究。建立了TiN相的三维数值模型，以显示所获得的涂层(TiAlSiY)N的原子结构。用Debye-Scherrer方法计算晶体的大小。

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Characteristics of Arc-PVD TiAlSiY and (TiAlSiY)N coatings

We consider the possibilities of synthesis of multielement nanoscale coatings by structural engeneering. Obtained nitride coating (TiAlSiY)N was compared to four-component alloy TiAlSiY to estimate the influence of the reaction gas on the structural-phase composition and mechanical parameters. Investigation of deposited coatings were performed within X-ray diffraction (XRD), scanning electron microscopy (SEM), and hardness measurement techniques. Three-dimensional numerical model of the TiN phase was created for visualization of the atomic structure of the obtained coating (TiAlSiY)N. Size of the crystallites was calculated within the Debye-Scherrer method.

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2017 IEEE 7th International Conference Nanomaterials: Application & Properties (NAP)

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