氢气处理对ZnO薄膜特性的影响

Lung-Chien Chen, Ching-Ho Tien
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引用次数: 2

摘要

采用超声喷涂热解法在玻璃基板上制备氧化锌薄膜。用氢处理沉积的ZnO薄膜,形成ZnO纳米结构。在处理20 min时,膜的均方根粗糙度由5.83 nm增加到12.53 nm,但在处理30 min时,RMS粗糙度略降至11.87 nm。在400 ~ 500 nm范围内,经过氢处理的膜的透明度均略低于未处理的膜。氢处理后薄膜透明度的轻微下降是由表面针孔或纳米结构的散射引起的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Influence of Hydrogen Gas Treatment on the Characteristics of ZnO Films
This study presents a zinc oxide (ZnO) film deposited on a glass substrate by ultrasonic spraying pyrolysis. The ZnO nanostructure was formed by treating the as-deposited ZnO films with hydrogen. The root-mean-square (RMS) roughness increases from 5.83 nm to 12.53 nm during the treatment for 20 min, but slightly decreases to 11.87 nm at a treatment time of 30 min. In the range 400-500 nm, the transparency of all the films with hydrogen treatment is slightly lower than that of the untreated films. The slight drop in the transparency of the films with hydrogen treatment is caused by scattering from pin-holes or nanostructures on the surface.
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