前驱体浓度和退火衬底温度对ZnO薄膜晶体结构、电子和光学性能的影响

Yus Rama Denny Muchtar, T. Firmansyah, A. Trenggono, Danu Wijaya, G. Antarnusa, A. Suherman
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摘要

研究了前驱体浓度和退火衬底温度对ZnO薄膜晶体结构、电子性能和光学性能的影响。以浓度为0.1 ~ 0.4 M的酸性亚硝酸盐水溶液为前驱体,采用喷雾热解沉积法将ZnO薄膜沉积在玻璃基板上,并在300 ~ 600℃的不同温度下进行退火,采用扫描电子显微镜(SEM)、x射线衍射仪(XRD)和紫外光谱仪(UV-Spectrometer)研究了ZnO薄膜的晶体结构、电子性能和光学性能。XRD结果表明,所有薄膜均为无定形六方纤锌矿结晶。采用Debye-Scherer法计算得到的粒径范围为21.83 ~ 43.67 nm。结果表明,前驱体浓度对颗粒大小影响较小。同时,随着退火温度的升高,晶粒尺寸的增大是渐进的。所有薄膜的平均透明度均在80%以上。利用Tauc图关系估计了ZnO薄膜的带隙。结果表明,由于Burstein-Moss效应,带隙值随着前驱体浓度的增加而增加。此外,带隙值随退火温度的升高而减小。研究结果表明,不同的前驱体浓度和退火衬底温度可以提高ZnO薄膜的结构、电子和光学性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of Precursor Concentration and Annealed Substrate Temperature on the Crystal Structure, Electronic and Optical Properties of ZnO thin film
This study carried out on the effect of precursor concentration and annealed substrate temperature on the crystal structure, electronic and optical properties of ZnO thin film. An aqueous solution of Acid Nitrite was used as precursors and its concentration was varied from 0.1 M to 0.4 M. The ZnO thin film was deposited on the glass substrate by Spray Pyrolysis Deposition and annealed with different temperature from 300 o C to 600 o C. The crystal structure, electronic and optical properties were investigated by Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and UV-Spectrometer. XRD result showed that all thin films have amorphous hexagonal wurtzite crystalline. Particle sizes ranging from 21.83 to 43.67 nm were calculated through Debye-Scherer Method. It showed that the concentration of the precursor had slightly impact on the particle size. Meanwhile, the increase in particle size with increasing annealed temperature is found to be gradual. The average transparent of all thin film was more than 80%. The bandgap of the ZnO thin films was estimated by Tauc Plot Relation. It showed that the bandgap values were increased with the increasing of precursor concentration due to Burstein-Moss Effect. In addition, the decrease in band gap values was found with increasing annealed temperature. Our results demonstrated that the varying precursor concentration and annealed substrate temperature can enhance the structure, electronic and the optical properties of ZnO thin films.
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