阶梯回流过程中,焊料尺寸对TSV芯片间Sn3.0Ag0.5Cu/Cu跨尺度接头中Cu - sn金属间化合物的界面反应和生长行为的影响

Tao Xu, Min-bo Zhou, Ze-Jun Zhang, Xing-Fei Zhao, Xin-Ping Zhang
{"title":"阶梯回流过程中,焊料尺寸对TSV芯片间Sn3.0Ag0.5Cu/Cu跨尺度接头中Cu - sn金属间化合物的界面反应和生长行为的影响","authors":"Tao Xu, Min-bo Zhou, Ze-Jun Zhang, Xing-Fei Zhao, Xin-Ping Zhang","doi":"10.1109/ICEPT47577.2019.245329","DOIUrl":null,"url":null,"abstract":"In this study, Sn3.0Ag0.5Cu (SAC305) solder balls with various diameters were used to fabricate cross-scale SAC305/Cu joints (from micro-bump joints to flip chip-BGA and then to board level BGA joints). Four different reflow peak temperatures of 300, 250, 200 and 150 °C were adopted for step-reflow processes. The interfacial reactions, evolution of microstructures, interfacial intermetallic compound (IMC) growth and Cu6Sn5 grain morphology change in cross-scale SAC305/Cu joints were investigated systematically. The results show that the proportion of IMC in cross-scale SAC305/Cu joints increases with decrease of solder diameter. The IMC layer in small joints is thicker than that in large joints during step-reflow processes because small solder joints have sufficient supply of Cu atoms for growth of Cu6Sn5. During step-reflow processes, the thickness of interfacial IMC layer increases with increasing the number of reflow cycles in crossscale SAC305/Cu joints regardless of diameters of solder balls.","PeriodicalId":6676,"journal":{"name":"2019 20th International Conference on Electronic Packaging Technology(ICEPT)","volume":"24 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Solder size effect on interfacial reaction and growth behavior of Cu–Sn intermetallic compounds in cross-scale Sn3.0Ag0.5Cu/Cu joints between stacking TSV chips during step-reflow processes\",\"authors\":\"Tao Xu, Min-bo Zhou, Ze-Jun Zhang, Xing-Fei Zhao, Xin-Ping Zhang\",\"doi\":\"10.1109/ICEPT47577.2019.245329\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study, Sn3.0Ag0.5Cu (SAC305) solder balls with various diameters were used to fabricate cross-scale SAC305/Cu joints (from micro-bump joints to flip chip-BGA and then to board level BGA joints). Four different reflow peak temperatures of 300, 250, 200 and 150 °C were adopted for step-reflow processes. The interfacial reactions, evolution of microstructures, interfacial intermetallic compound (IMC) growth and Cu6Sn5 grain morphology change in cross-scale SAC305/Cu joints were investigated systematically. The results show that the proportion of IMC in cross-scale SAC305/Cu joints increases with decrease of solder diameter. The IMC layer in small joints is thicker than that in large joints during step-reflow processes because small solder joints have sufficient supply of Cu atoms for growth of Cu6Sn5. During step-reflow processes, the thickness of interfacial IMC layer increases with increasing the number of reflow cycles in crossscale SAC305/Cu joints regardless of diameters of solder balls.\",\"PeriodicalId\":6676,\"journal\":{\"name\":\"2019 20th International Conference on Electronic Packaging Technology(ICEPT)\",\"volume\":\"24 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 20th International Conference on Electronic Packaging Technology(ICEPT)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICEPT47577.2019.245329\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 20th International Conference on Electronic Packaging Technology(ICEPT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEPT47577.2019.245329","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

本研究采用不同直径的Sn3.0Ag0.5Cu (SAC305)焊料球制备跨尺度SAC305/Cu接头(从微碰撞接头到倒装芯片BGA再到板级BGA接头)。采用300、250、200、150℃四种不同的回流峰温度进行步进回流工艺。系统研究了SAC305/Cu跨尺度接头的界面反应、微观组织演变、界面金属间化合物(IMC)生长和Cu6Sn5晶粒形貌变化。结果表明:随着焊料直径的减小,跨尺度SAC305/Cu接头中IMC的比例增大;在步进回流过程中,小焊点的IMC层比大焊点的IMC层厚,这是因为小焊点有足够的Cu原子供Cu6Sn5生长。在阶梯回流过程中,无论焊料球直径如何,跨尺度SAC305/Cu接头的界面IMC层厚度都随着回流次数的增加而增加。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Solder size effect on interfacial reaction and growth behavior of Cu–Sn intermetallic compounds in cross-scale Sn3.0Ag0.5Cu/Cu joints between stacking TSV chips during step-reflow processes
In this study, Sn3.0Ag0.5Cu (SAC305) solder balls with various diameters were used to fabricate cross-scale SAC305/Cu joints (from micro-bump joints to flip chip-BGA and then to board level BGA joints). Four different reflow peak temperatures of 300, 250, 200 and 150 °C were adopted for step-reflow processes. The interfacial reactions, evolution of microstructures, interfacial intermetallic compound (IMC) growth and Cu6Sn5 grain morphology change in cross-scale SAC305/Cu joints were investigated systematically. The results show that the proportion of IMC in cross-scale SAC305/Cu joints increases with decrease of solder diameter. The IMC layer in small joints is thicker than that in large joints during step-reflow processes because small solder joints have sufficient supply of Cu atoms for growth of Cu6Sn5. During step-reflow processes, the thickness of interfacial IMC layer increases with increasing the number of reflow cycles in crossscale SAC305/Cu joints regardless of diameters of solder balls.
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