Widely tunable high-Q evanescent-mode resonators using flexible polymer substrates

Widely tunable high-Q evanescent-mode resonators are created using layer-by-layer polymer stereolithography process. The ability of polymer stereolithography process to fabricate thin flexible 3D structures with small fabrication tolerances enables the realization of highly loaded tunable evanescent-mode resonators. A tunable frequency range of 5.4-10.9 GHz, which corresponds to an equivalent capacitance tunability of 400%, is obtained with quality factors ranging from 745 to 1,580 over the tunable frequency range.